{"id":775,"date":"2025-07-22T18:21:25","date_gmt":"2025-07-22T10:21:25","guid":{"rendered":"http:\/\/www.sdjxsjy.com\/?p=775"},"modified":"2025-07-22T18:21:26","modified_gmt":"2025-07-22T10:21:26","slug":"%e5%be%ae%e8%a7%82%e4%b8%96%e7%95%8c%e7%9a%84%e9%9b%95%e5%88%bb%e5%88%80%ef%bc%9a%e5%88%bb%e8%9a%80%e6%9c%ba%e6%8a%80%e6%9c%af%e6%bc%94%e8%bf%9b%e4%b8%8e%e4%ba%a7%e4%b8%9a%e7%aa%81%e7%a0%b4","status":"publish","type":"post","link":"http:\/\/www.sdjxsjy.com\/?p=775","title":{"rendered":"\u5fae\u89c2\u4e16\u754c\u7684\u96d5\u523b\u5200\uff1a\u523b\u8680\u673a\u6280\u672f\u6f14\u8fdb\u4e0e\u4ea7\u4e1a\u7a81\u7834"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">\u5728\u534a\u5bfc\u4f53\u82af\u7247\u7684\u5fae\u89c2\u5b87\u5b99\u4e2d\uff0c\u523b\u8680\u673a\u5982\u540c\u7eb3\u7c73\u7ea7\u7684\u96d5\u523b\u5200\uff0c\u51b3\u5b9a\u7740\u6570\u4ebf\u6676\u4f53\u7ba1\u7684\u5f62\u6001\u4e0e\u547d\u8fd0\u3002\u5f53\u5149\u523b\u673a\u5c06\u7535\u8def\u56fe\u6848\u6295\u5f71\u5230\u7845\u7247\u7684\u5149\u523b\u80f6\u4e0a\uff0c\u523b\u8680\u673a\u4fbf\u63a5\u8fc7\u5236\u9020\u63a5\u529b\u68d2\uff0c\u5c06\u4e8c\u7ef4\u56fe\u5f62\u8f6c\u5316\u4e3a\u4e09\u7ef4\u7ed3\u6784\u2014\u2014\u901a\u8fc7\u7269\u7406\u8f70\u51fb\u6216\u5316\u5b66\u53cd\u5e94\uff0c\u7cbe\u786e\u53bb\u9664\u672a\u88ab\u4fdd\u62a4\u7684\u6750\u6599\uff0c\u5728<strong>\u6bd4\u5934\u53d1\u4e1d\u7ec6\u5343\u500d<\/strong>\u7684\u5c3a\u5ea6\u4e0a\u96d5\u523b\u51fa\u82af\u7247\u7684\u7269\u7406\u7ed3\u6784\u3002<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u3001\u523b\u8680\u6280\u672f\u539f\u7406\uff1a\u7269\u7406\u4e0e\u5316\u5b66\u7684\u5171\u821e<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u523b\u8680\u5de5\u827a\u7684\u6838\u5fc3\u5728\u4e8e<strong>\u7cbe\u786e\u53bb\u9664\u6750\u6599<\/strong>\uff0c\u5176\u6280\u672f\u8def\u7ebf\u4e3b\u8981\u5206\u4e3a\u5e72\u6cd5\u523b\u8680\u4e0e\u6e7f\u6cd5\u523b\u8680\u4e24\u5927\u65b9\u5411\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6e7f\u6cd5\u523b\u8680<\/strong>\u4f9d\u8d56\u5316\u5b66\u6eb6\u6db2\u7684\u6d78\u6ce1\u8150\u8680\uff0c\u901a\u8fc7\u5f3a\u9178\uff08\u5982\u6c22\u6c1f\u9178\uff09\u6216\u5f3a\u78b1\u4e0e\u7845\u7247\u8868\u9762\u6750\u6599\u53cd\u5e94\u751f\u6210\u53ef\u6eb6\u6027\u7269\u8d28\u3002\u8fd9\u79cd\u65b9\u6cd5\u867d\u64cd\u4f5c\u7b80\u5355\uff0c\u4f46\u56e0<strong>\u5404\u5411\u540c\u6027\u8150\u8680<\/strong>\u7684\u7279\u6027\uff0c\u5bfc\u81f4\u5176\u5728\u6a2a\u5411\u548c\u7eb5\u5411\u7684\u8150\u8680\u901f\u7387\u76f8\u540c\uff0c\u96be\u4ee5\u63a7\u5236\u7cbe\u7ec6\u56fe\u5f62\uff0c\u9010\u6e10\u88ab\u8fb9\u7f18\u5316\u4e8e\u5148\u8fdb\u5236\u7a0b\u3002<\/li>\n\n\n\n<li><strong>\u5e72\u6cd5\u523b\u8680<\/strong>\u5219\u6210\u4e3a\u73b0\u4ee3\u534a\u5bfc\u4f53\u5236\u9020\u7684\u4e3b\u6d41\uff0c\u5c24\u5176\u662f<strong>\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09<\/strong>\u3002\u5b83\u7ed3\u5408\u4e86\u7269\u7406\u8f70\u51fb\u4e0e\u5316\u5b66\u53cd\u5e94\u7684\u53cc\u91cd\u673a\u5236\uff1a\n<ul class=\"wp-block-list\">\n<li>\u5728\u771f\u7a7a\u8154\u4f53\u5185\u901a\u5165\u523b\u8680\u6c14\u4f53\uff08\u5982\u6c1f\u57fa\u7684SF\u2086\u6216\u6c2f\u57fa\u6c14\u4f53\uff09\uff0c\u901a\u8fc7\u5c04\u9891\u7535\u573a\u6fc0\u53d1\u5f62\u6210\u7b49\u79bb\u5b50\u4f53\uff1b<\/li>\n\n\n\n<li>\u5176\u4e2d\u7684<strong>\u6d3b\u6027\u81ea\u7531\u57fa<\/strong>\u4e0e\u7845\u539f\u5b50\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u751f\u6210\u6325\u53d1\u6027\u4ea7\u7269\uff08\u5982SiF\u2084\uff09\uff1b<\/li>\n\n\n\n<li>\u540c\u65f6<strong>\u9ad8\u80fd\u79bb\u5b50<\/strong>\u5728\u7535\u573a\u52a0\u901f\u4e0b\u5782\u76f4\u8f70\u51fb\u7845\u7247\uff0c\u6253\u7834\u6750\u6599\u5316\u5b66\u952e\u5e76\u6e05\u9664\u53cd\u5e94\u526f\u4ea7\u7269\uff0c\u5b9e\u73b0<strong>\u5404\u5411\u5f02\u6027\u523b\u8680<\/strong>\u2014\u2014\u5373\u5782\u76f4\u65b9\u5411\u6df1\u5ea6\u8fdc\u5927\u4e8e\u6a2a\u5411\u6269\u6563\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3a\u63d0\u5347\u523b\u8680\u7684\u7cbe\u5ea6\u4e0e\u6548\u7387\uff0c\u5de5\u7a0b\u5e08\u9700\u7cbe\u5bc6\u8c03\u63a7\u6c14\u4f53\u914d\u6bd4\u3001\u5c04\u9891\u529f\u7387\u3001\u6c14\u538b\u7b49\u53c2\u6570\u3002\u4f8b\u5982\uff0c\u5728\u6df1\u5b54\u523b\u8680\u4e2d\uff0c\u6dfb\u52a0\u6c22\u6c14\uff08H\u2082\uff09\u53ef\u589e\u5f3a\u4fa7\u58c1\u949d\u5316\uff0c\u6291\u5236\u6a2a\u5411\u523b\u8680\uff1b\u800c\u6c29\u6c14\u7684\u52a0\u5165\u80fd\u7a33\u5b9a\u7b49\u79bb\u5b50\u4f53\u5e76\u63d0\u9ad8\u79bb\u5b50\u8f70\u51fb\u6548\u7387\u3002<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e8c\u3001\u6280\u672f\u6f14\u8fdb\uff1a\u4eceRIE\u5230\u91cf\u5b50\u7ea7\u7cbe\u5ea6\u7684\u98de\u8dc3<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u523b\u8680\u8bbe\u5907\u7684\u8fdb\u5316\u53f2\u662f\u4e00\u90e8\u7a81\u7834\u7269\u7406\u6781\u9650\u7684\u521b\u65b0\u53f2\uff0c\u5176\u6838\u5fc3\u5728\u4e8e\u5bf9\u7b49\u79bb\u5b50\u4f53\u5bc6\u5ea6\u4e0e\u65b9\u5411\u63a7\u5236\u7684\u6301\u7eed\u4f18\u5316\uff1a<\/p>\n\n\n\n<ol start=\"1\" class=\"wp-block-list\">\n<li><strong>\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09<\/strong><br>\u4f5c\u4e3a\u57fa\u7840\u673a\u578b\uff0cRIE\u901a\u8fc7\u9634\u9633\u7535\u6781\u95f4\u7684\u5c04\u9891\u7535\u573a\u4ea7\u751f\u7b49\u79bb\u5b50\u4f53\u3002\u5176\u4f18\u52bf\u5728\u4e8e<strong>\u826f\u597d\u7684\u5f62\u8c8c\u63a7\u5236<\/strong>\u548c<strong>\u8f83\u9ad8\u9009\u62e9\u6bd4<\/strong>\uff08\u5373\u53ea\u8680\u523b\u76ee\u6807\u6750\u6599\u800c\u4e0d\u635f\u4f24\u63a9\u819c\u6216\u4e0b\u5c42\uff09\u3002\u4f46\u53d7\u9650\u4e8e\u7b49\u79bb\u5b50\u4f53\u5bc6\u5ea6\u8f83\u4f4e\uff0c\u5176\u6df1\u5bbd\u6bd4\uff08\u8680\u523b\u6df1\u5ea6\u4e0e\u5bbd\u5ea6\u4e4b\u6bd4\uff09\u901a\u5e38\u96be\u4ee5\u7a81\u783410:1\uff0c\u4e14\u79bb\u5b50\u8f70\u51fb\u6613\u5bfc\u81f4\u7845\u7247\u8868\u9762\u635f\u4f24\u3002<\/li>\n\n\n\n<li><strong>\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53\u523b\u8680\uff08ICP\uff09<\/strong><br>\u4e3a\u514b\u670dRIE\u7684\u7f3a\u9677\uff0cICP\u5728\u8154\u4f53\u9876\u90e8\u589e\u8bbe<strong>\u5c04\u9891\u7ebf\u5708<\/strong>\uff0c\u901a\u8fc7\u7535\u78c1\u611f\u5e94\u751f\u6210<strong>\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50\u4f53<\/strong>\uff08\u5bc6\u5ea6\u53ef\u8fbeRIE\u768410\u500d\uff09\u3002\u540c\u65f6\uff0c\u6676\u5706\u53f0\u5355\u72ec\u65bd\u52a0\u504f\u538b\uff08Bias\uff09\u63a7\u5236\u79bb\u5b50\u8f70\u51fb\u80fd\u91cf\u3002\u8fd9\u79cd\u89e3\u8026\u8bbe\u8ba1\u4f7f\u523b\u8680\u901f\u7387\u4e0e\u65b9\u5411\u6027\u72ec\u7acb\u53ef\u63a7\uff0c\u53ef\u5b9e\u73b0\u6df1\u5bbd\u6bd4\u8d85\u8fc740:1\u7684\u7ed3\u6784\u2014\u2014\u4f8b\u5982\u76f4\u5f845\u03bcm\u3001\u6df1\u5ea6200\u03bcm\u7684\u7845\u901a\u5b54\uff08TSV\uff09\u3002<\/li>\n\n\n\n<li><strong>\u535a\u4e16\u5de5\u827a\uff08Bosch Process\uff09<\/strong><br>\u9488\u5bf9\u8d85\u9ad8\u6df1\u5bbd\u6bd4\u9700\u6c42\uff0c\u535a\u4e16\u5de5\u827a\u91c7\u7528<strong>\u4ea4\u66ff\u5faa\u73af<\/strong>\u6280\u672f\uff1a\n<ul class=\"wp-block-list\">\n<li><strong>\u6c89\u79ef\u9636\u6bb5<\/strong>\uff1a\u901a\u5165C\u2084F\u2088\u6c14\u4f53\u5f62\u6210\u6c1f\u78b3\u805a\u5408\u7269\u4fdd\u62a4\u4fa7\u58c1\uff1b<\/li>\n\n\n\n<li><strong>\u523b\u8680\u9636\u6bb5<\/strong>\uff1a\u5207\u6362\u4e3aSF\u2086\u6c14\u4f53\uff0c\u79bb\u5b50\u8f70\u51fb\u4ec5\u79fb\u9664\u5e95\u90e8\u4fdd\u62a4\u5c42\u5e76\u5782\u76f4\u5411\u4e0b\u8680\u523b\u7845\u3002<br>\u8be5\u5de5\u827a\u7684\u6210\u8d25\u5173\u952e\u5728\u4e8e<strong>\u6c14\u4f53\u5207\u6362\u901f\u5ea6<\/strong>\uff1a\u82e5\u5207\u6362\u8fc7\u6162\uff0c\u4f1a\u5bfc\u81f4\u4fa7\u58c1\u51fa\u73b0\u201c\u6247\u8d1d\u72b6\u201d\u51f9\u51f8\uff08scalloping\uff09\uff0c\u5f71\u54cd\u7ed3\u6784\u5f3a\u5ea6\u3002\u5148\u8fdb\u8bbe\u5907\u5df2\u5b9e\u73b00.1\u79d2\u9ad8\u901f\u5207\u6362\uff0c\u5c06\u6247\u8d1d\u5c3a\u5bf8\u63a7\u5236\u57285nm\u4ee5\u5185\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e09\u3001\u4ea7\u4e1a\u7a81\u7834\uff1a\u56fd\u4ea7\u523b\u8680\u673a\u7684\u7834\u5c40\u4e4b\u8def<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">2025\u5e747\u6708\uff0c\u5f53ASML\u5ba3\u5e03\u5168\u7403\u9996\u53f0\u652f\u63012nm\u5de5\u827a\u7684High NA EUV\u5149\u523b\u673a\uff08\u5355\u4ef730\u4ebf\u5143\uff09\u4ea4\u4ed8\u82f1\u7279\u5c14\u65f6\uff0c\u4e2d\u56fd\u523b\u8680\u673a\u9886\u57df\u6084\u7136\u5b9e\u73b0\u4e86\u4e00\u6b21\u201c\u6280\u672f\u5bf9\u79f0\u7a81\u7834\u201d\uff1a\u56fd\u5149\u91cf\u8d85\u63a8\u51fa\u7684<strong>1nm\u79bb\u5b50\u675f\u523b\u8680\u673a<\/strong>\uff0c\u867d\u805a\u7126\u4e8e\u91cf\u5b50\u82af\u7247\u800c\u975e\u4f20\u7edf\u534a\u5bfc\u4f53\uff0c\u4f46\u5176\u610f\u4e49\u4e0d\u4e9a\u4e8e\u5149\u523b\u673a\u7684\u8fdb\u5c55\u3002\u8be5\u8bbe\u5907\u7684\u6838\u5fc3\u7a81\u7834\u5728\u4e8e\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4e9a\u7eb3\u7c73\u7cbe\u5ea6\u63a7\u5236<\/strong>\uff1a\u675f\u6d41\u7a33\u5b9a\u6027\u8bef\u5dee&lt;0.1nm\uff0c\u786e\u4fdd\u91cf\u5b50\u6bd4\u7279\u95f4\u8026\u5408\u7ed3\u6784\u7684\u7cbe\u786e\u6210\u5f62\uff1b<\/li>\n\n\n\n<li><strong>\u81ea\u7814\u79bb\u5b50\u6e90<\/strong>\uff1a\u5bff\u547d\u8f83\u4f20\u7edf\u8bbe\u8ba1\u63d0\u53473\u500d\uff0c\u964d\u4f4e\u505c\u673a\u7ef4\u62a4\u6210\u672c\uff1b<\/li>\n\n\n\n<li><strong>4\u82f1\u5bf8\u517c\u5bb9\u6027<\/strong>\uff1a\u5339\u914d\u5f53\u524d\u91cf\u5b50\u82af\u7247\u4e3b\u6d41\u886c\u5e95\u5c3a\u5bf8\u3002<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u8fd9\u4e00\u7a81\u7834\u7684\u80cc\u666f\uff0c\u662f\u4e2d\u56fd\u5728\u6210\u719f\u5236\u7a0b\u523b\u8680\u8bbe\u5907\u9886\u57df\u7684\u957f\u671f\u79ef\u7d2f\u3002\u4f8b\u5982\u5728<strong>\u7845\u6df1\u5b54\u523b\u8680<\/strong>\u9886\u57df\uff0c\u4e2d\u56fd\u7814\u7a76\u56e2\u961f\u5df2\u5b9e\u73b0185\u03bcm\u6df1\u5ea6\u30019:1\u6df1\u5bbd\u6bd4\u3001\u4fa7\u58c1\u7c97\u7cd9\u5ea6&lt;64nm\u7684\u5de5\u827a\u6307\u6807\uff0c\u5e94\u7528\u4e8e\u8584\u819c\u4f53\u58f0\u6ce2\u6ee4\u6ce2\u5668\uff08FBAR\uff09\u7684\u6676\u5706\u7ea7\u5c01\u88c53\u3002\u800c\u5728<strong>\u6676\u5706\u5207\u5272<\/strong>\u73af\u8282\uff0c\u7b49\u79bb\u5b50\u8680\u523b\u6280\u672f\u9010\u6b65\u66ff\u4ee3\u91d1\u521a\u77f3\u5200\u7247\uff0c\u53ef\u5904\u740614.5\u03bcm\u8d85\u7a84\u5207\u5272\u9053\uff0c\u4e14\u65e0\u7269\u7406\u5e94\u529b\u635f\u4f24\uff0c\u63d0\u5347\u82af\u7247\u826f\u738715%\u4ee5\u4e0a\u3002<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u56db\u3001\u5e94\u7528\u573a\u666f\uff1a\u4ece\u7ecf\u5178\u82af\u7247\u5230\u91cf\u5b50\u672a\u6765<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u903b\u8f91\u82af\u7247\u5236\u9020<\/strong>\uff1a\u57287nm\u4ee5\u4e0b\u5236\u7a0b\u4e2d\uff0cRIE\u4e0eICP\u627f\u62c5\u6805\u6781\u523b\u8680\u3001\u63a5\u89e6\u5b54\u6210\u578b\u7b49\u5173\u952e\u6b65\u9aa4\u3002\u4f8b\u5982\u5728FinFET\u5de5\u827a\u4e2d\uff0c\u9700\u5728\u7845\u4e0a\u523b\u8680\u51fa\u9ccd\u7247\uff08Fin\uff09\u7ed3\u6784\uff0c\u5176\u9661\u76f4\u5ea6\u8981\u6c42&gt;89\u00b0\uff0c\u4efb\u4f55\u5fae\u5c0f\u504f\u5dee\u5c06\u5bfc\u81f4\u6676\u4f53\u7ba1\u6f0f\u7535\u3002<\/li>\n\n\n\n<li><strong>\u4e09\u7ef4\u5c01\u88c5<\/strong>\uff1a\u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u903c\u8fd1\u7269\u7406\u6781\u9650\uff0c<strong>\u7845\u901a\u5b54\uff08TSV\uff09<\/strong>&nbsp;\u6210\u4e3a\u82af\u7247\u5806\u53e0\u7684\u5173\u952e\u3002\u901a\u8fc7\u535a\u4e16\u5de5\u827a\u5728\u7845\u7247\u4e0a\u523b\u8680\u6df1\u5b54\u5e76\u586b\u5145\u94dc\uff0c\u5b9e\u73b0\u5782\u76f4\u4e92\u8054\uff0c\u53ef\u4f7f\u6570\u636e\u4f20\u8f93\u901f\u5ea6\u63d0\u53475\u500d\uff0c\u80fd\u8017\u964d\u4f4e30%\u3002<\/li>\n\n\n\n<li><strong>MEMS\u4f20\u611f\u5668<\/strong>\uff1a\u52a0\u901f\u5ea6\u8ba1\u3001\u9640\u87ba\u4eea\u7b49\u5668\u4ef6\u7684\u53ef\u52a8\u7ed3\u6784\u4f9d\u8d56<strong>\u91ca\u653e\u523b\u8680<\/strong>\u2014\u2014\u5728\u727a\u7272\u5c42\u88ab\u6a2a\u5411\u8680\u523b\u540e\uff0c\u5f62\u6210\u60ac\u6d6e\u7684\u5fae\u6881\u4e0e\u7a7a\u8154\u3002\u6b64\u8fc7\u7a0b\u8981\u6c42\u8d85\u9ad8\u9009\u62e9\u6bd4\uff08&gt;100:1\uff09\u4ee5\u907f\u514d\u7ed3\u6784\u635f\u4f24\u3002<\/li>\n\n\n\n<li><strong>\u91cf\u5b50\u82af\u7247<\/strong>\uff1a\u8d85\u5bfc\u91cf\u5b50\u7535\u8def\u9700\u8981\u52a0\u5de5\u7ea6\u745f\u592b\u68ee\u7ed3\u7684\u7eb3\u7c73\u6865\u4e0e\u8c10\u632f\u8154\u3002\u56fd\u5149\u91cf\u8d85\u76841nm\u523b\u8680\u673a\u53ef\u63a7\u5236\u91cf\u5b50\u6bd4\u7279\u5c3a\u5bf8\u8bef\u5dee\u57280.3%\u5185\uff0c\u5927\u5e45\u63d0\u5347\u76f8\u5e72\u65f6\u95f4\uff0c\u4e3a\u5927\u89c4\u6a21\u91cf\u5b50\u8ba1\u7b97\u673a\u5960\u5b9a\u57fa\u7840\u3002<\/li>\n<\/ul>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u672a\u6765\u6311\u6218\uff1a\u7cbe\u5ea6\u3001\u6750\u6599\u4e0e\u6210\u672c\u7684\u4e09\u89d2\u5e73\u8861<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u523b\u8680\u6280\u672f\u7684\u524d\u6cbf\u4ecd\u9762\u4e34\u4e09\u91cd\u6311\u6218\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u539f\u5b50\u7ea7\u7cbe\u5ea6<\/strong>\uff1a\u5f53\u523b\u8680\u5c3a\u5bf8\u903c\u8fd1\u539f\u5b50\u76f4\u5f84\uff08~0.3nm\uff09\uff0c\u79bb\u5b50\u8f70\u51fb\u5bfc\u81f4\u7684\u6676\u683c\u635f\u4f24\u96be\u4ee5\u907f\u514d\uff0c\u9700\u5f00\u53d1\u4f4e\u6e29\u523b\u8680\u6216\u539f\u5b50\u5c42\u523b\u8680\uff08ALE\uff09\u7b49\u65b0\u65b9\u6848\uff1b<\/li>\n\n\n\n<li><strong>\u65b0\u6750\u6599\u9002\u914d<\/strong>\uff1a\u78b3\u5316\u7845\uff08SiC\uff09\u3001\u6c2e\u5316\u9553\uff08GaN\uff09\u7b49\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u786c\u5ea6\u9ad8\u3001\u5316\u5b66\u60f0\u6027\u5f3a\uff0c\u4f20\u7edf\u6c1f\u57fa\u6c14\u4f53\u523b\u8680\u901f\u7387\u4e0d\u8db31\u03bcm\/min\uff0c\u4e9f\u5f85\u5f00\u53d1\u65b0\u578b\u5364\u7d20\u6c14\u4f53\u914d\u65b9\uff1b<\/li>\n\n\n\n<li><strong>\u6210\u672c\u63a7\u5236<\/strong>\uff1a\u4e00\u53f0\u5148\u8fdb\u523b\u8680\u673a\u4ef7\u683c\u8d853000\u4e07\u7f8e\u5143\uff0c\u800c3nm\u82af\u7247\u9700\u7ecf\u5386\u8d851000\u9053\u523b\u8680\u5de5\u5e8f\uff0c\u5982\u4f55\u63d0\u5347\u8bbe\u5907\u541e\u5410\u91cf\uff08\u5982\u56fd\u5149\u8bbe\u5907\u6548\u7387\u63d0\u534740%\uff09\u6210\u4e3a\u7ade\u4e89\u7126\u70b9\u3002<\/li>\n<\/ul>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h3 class=\"wp-block-heading\">\u7ed3\u8bed\uff1a\u5fae\u89c2\u96d5\u523b\u7684\u827a\u672f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u523b\u8680\u673a\u7684\u53d1\u5c55\u53f2\u662f\u4e00\u90e8\u4eba\u7c7b\u5728\u7eb3\u7c73\u5c3a\u5ea6\u6311\u6218\u7269\u7406\u6781\u9650\u7684\u58ee\u4e3d\u53f2\u8bd7\u3002\u5f531nm\u79bb\u5b50\u675f\u523b\u8680\u673a\u5728\u91cf\u5b50\u82af\u7247\u4e0a\u96d5\u7422\u51fa\u7231\u56e0\u65af\u5766\u672a\u66fe\u60f3\u8c61\u7684\u5fae\u89c2\u7ed3\u6784\u65f6\uff0c\u8fd9\u9879\u878d\u5408\u4e86\u7b49\u79bb\u5b50\u4f53\u7269\u7406\u3001\u8868\u9762\u5316\u5b66\u4e0e\u7cbe\u5bc6\u673a\u68b0\u7684\u6280\u672f\uff0c\u5df2\u7136\u6210\u4e3a\u4fe1\u606f\u6587\u660e\u7684\u9690\u5f62\u652f\u67f1\u3002\u672a\u6765\uff0c\u968f\u7740\u4e8c\u7ef4\u6750\u6599\u3001\u62d3\u6251\u91cf\u5b50\u5668\u4ef6\u7b49\u65b0\u9886\u57df\u7684\u5174\u8d77\uff0c\u8fd9\u628a\u201c\u5fae\u89c2\u96d5\u523b\u5200\u201d\u5c06\u4e0d\u65ad\u91cd\u65b0\u5b9a\u4e49\u53ef\u80fd\u7684\u8fb9\u754c\u3002<\/p>\n\n\n\n<blockquote class=\"wp-block-quote\">\n<p class=\"wp-block-paragraph\"><strong>\u8868\uff1a\u4e3b\u6d41\u523b\u8680\u6280\u672f\u5bf9\u6bd4<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>\u6280\u672f\u7c7b\u578b<\/strong><\/th><th><strong>\u539f\u7406<\/strong><\/th><th><strong>\u7279\u70b9<\/strong><\/th><th><strong>\u5178\u578b\u5e94\u7528<\/strong><\/th><th><strong>\u5c40\u9650\u6027<\/strong><\/th><\/tr><\/thead><tbody><tr><td><strong>\u6e7f\u6cd5\u523b\u8680<\/strong><\/td><td>\u5316\u5b66\u6eb6\u6db2\u6eb6\u89e3\u6750\u6599<\/td><td>\u5404\u5411\u540c\u6027\uff0c\u64cd\u4f5c\u7b80\u5355<\/td><td>\u65e7\u5236\u7a0b\u3001\u6e05\u6d17<\/td><td>\u56fe\u5f62\u7cbe\u5ea6\u4f4e<\/td><\/tr><tr><td><strong>RIE<\/strong><\/td><td>\u7269\u7406+\u5316\u5b66\u534f\u540c<\/td><td>\u4e2d\u7b49\u6df1\u5bbd\u6bd4\uff0c\u6210\u672c\u8f83\u4f4e<\/td><td>\u4ecb\u8d28\u5c42\u523b\u8680<\/td><td>\u8868\u9762\u635f\u4f24\u5927<\/td><\/tr><tr><td><strong>ICP<\/strong><\/td><td>\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50\u4f53<\/td><td>\u9ad8\u6df1\u5bbd\u6bd4\uff08&gt;40\uff1a1\uff09<\/td><td>\u7845\u901a\u5b54\u3001MEMS<\/td><td>\u8bbe\u5907\u590d\u6742<\/td><\/tr><tr><td><strong>\u535a\u4e16\u5de5\u827a<\/strong><\/td><td>\u6c89\u79ef\/\u523b\u8680\u4ea4\u66ff\u5faa\u73af<\/td><td>\u8d85\u9ad8\u6df1\u5bbd\u6bd4\uff0c\u9661\u76f4\u4fa7\u58c1<\/td><td>TSV\u3001\u6df1\u6c9f\u69fd\u9694\u79bb<\/td><td>\u4fa7\u58c1\u53ef\u80fd\u7c97\u7cd9<\/td><\/tr><tr><td><strong>\u79bb\u5b50\u675f\u523b\u8680<\/strong><\/td><td>\u7eaf\u7269\u7406\u79bb\u5b50\u8f70\u51fb<\/td><td>\u65e0\u5316\u5b66\u53cd\u5e94\uff0c\u7cbe\u5ea6\u8fbe1nm<\/td><td>\u91cf\u5b50\u82af\u7247\u3001\u8d35\u91d1\u5c5e<\/td><td>\u901f\u7387\u6162\uff0c\u6210\u672c\u9ad8<\/td><\/tr><\/tbody><\/table><\/figure>\n<\/blockquote>\n","protected":false},"excerpt":{"rendered":"<p>\u5728\u534a\u5bfc\u4f53\u82af\u7247\u7684\u5fae\u89c2\u5b87\u5b99\u4e2d\uff0c\u523b\u8680\u673a\u5982\u540c\u7eb3\u7c73\u7ea7\u7684\u96d5\u523b\u5200\uff0c\u51b3\u5b9a\u7740\u6570\u4ebf\u6676\u4f53\u7ba1\u7684\u5f62\u6001\u4e0e\u547d\u8fd0\u3002\u5f53\u5149\u523b\u673a\u5c06\u7535\u8def\u56fe\u6848\u6295\u5f71\u5230\u7845\u7247 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":784,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":false,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":false,"footnotes":""},"categories":[2],"tags":[],"class_list":["post-775","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"metadata":{"_edit_lock":["1753179687:1"],"_edit_last":["1"],"catce":["sidebar-widgets4"],"_thumbnail_id":["784"],"views":["503"]},"medium_url":"http:\/\/www.sdjxsjy.com\/wp-content\/uploads\/2025\/07\/\u523b\u8680\u673a-300x300.png","thumbnail_url":"http:\/\/www.sdjxsjy.com\/wp-content\/uploads\/2025\/07\/\u523b\u8680\u673a-150x150.png","full_url":"http:\/\/www.sdjxsjy.com\/wp-content\/uploads\/2025\/07\/\u523b\u8680\u673a.png","_links":{"self":[{"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/posts\/775","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=775"}],"version-history":[{"count":3,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/posts\/775\/revisions"}],"predecessor-version":[{"id":785,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/posts\/775\/revisions\/785"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=\/wp\/v2\/media\/784"}],"wp:attachment":[{"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=775"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=775"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.sdjxsjy.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=775"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}